High Productivity / High Overlay Accuracy i-line Stepper Features FPA-5550iZ2 steppers provide the highest productivity & overlay accuracy among i-line Lithography Equipment Canon has achieved the *highest level of productivity (throughput) among all equivalent class i-line Lithography Equipment. FPA-5550iZ2 steppers optimize alignment, exposure & wafer transfer sequences, shorten wafer lot exchange times and speed up measurement and calibration processing to reduce wafer processing times. FPA-5550iZ2 steppers can apply a Shot Shape Compensator (SSC Unit) to enable intrafield correction of vertical and horizontal magnification differences and skew (shot distortion in diagonal orientation) within each exposure field. The SSC Unit employs original Canon technology in the projection optical system that allows improved matching to underlying layers and improved overlay accuracy. FPA-5550iZ2 steppers feature a variety of solutions for logic, memory & image sensor fabrication Productivity and Overlay Improvement options that balance throughput and overlay accuracy are available. Color filter and other alignment system options established for earlier FPA-5550iZ steppers allow stable operation and flexibility for a variety of processes.